The CTI-Cryogenics On-Board® IS 320F XVS Cryopump maintains Edwards’ tradition of delivering the most reliable and best performing implant cryopumps on the market. The On-Board® IS 320F XVS cryopump is designed to deliver the highest hydrogen pumping performance for improved process yield and throughput, offering the perfect answer to today’s Ion Implant applications challenges. The intelligent system control integrated in the cryopump ensures better process quality, vacuum consistency, and uptime, while providing real-time system information for optimum control of array temperatures. Vacuum quality is enhanced by automatic adaptation to changing thermal/gas loading conditions.
Stable Vacuum Performance
Reduced H2 Pumping Speed Variation between Regenerations
Reduced Impact to H2 Pumping Speed due to Photoresist Contamination
Optimized stable array temperatures
Enhanced Vacuum Performance
High H2 Pumping Speed-15,500 L/S
High H2 Capacity – 40 STD-L
System Compatibility
On-Board _IS_ Cryopump systems
_IS_-1000, _IS_-2000V, _IS_-1800 XVS Compressors
Key attributes
Category
Semiconductor
Place of origin
Pune, MH, India
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