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CTI-Cryogenics On-Board IS 320F XVS Cryopump

EDWARDS INDIA PRIVATE LIMITEDPune, MH
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Anchored to the MCA registerCIN U29254PN2007PTC137623
Price on request. Ask the factory for a quote.
MOQ not stated Lead time on requestCurrency INR
Key attributesAll specs
Category
Cryopumps
Place of origin
Pune, MH, India

About this item

  • Stable Vacuum Performance
  • Enhanced Vacuum Performance
  • System Compatibility

Description

The CTI-Cryogenics On-Board® IS 320F XVS Cryopump maintains Edwards’ tradition of delivering the most reliable and best performing implant cryopumps on the market. The On-Board® IS 320F XVS cryopump is designed to deliver the highest hydrogen pumping performance for improved process yield and throughput, offering the perfect answer to today’s Ion Implant applications challenges. The intelligent system control integrated in the cryopump ensures better process quality, vacuum consistency, and uptime, while providing real-time system information for optimum control of array temperatures. Vacuum quality is enhanced by automatic adaptation to changing thermal/gas loading conditions.

Stable Vacuum Performance

  • Reduced H2 Pumping Speed Variation between Regenerations
  • Reduced Impact to H2 Pumping Speed due to Photoresist Contamination
  • Optimized stable array temperatures

Enhanced Vacuum Performance

  • High H2 Pumping Speed-15,500 L/S
  • High H2 Capacity – 40 STD-L

System Compatibility

  • On-Board _IS_ Cryopump systems
  • _IS_-1000, _IS_-2000V, _IS_-1800 XVS Compressors

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EDWARDS INDIA PRIVATE LIMITED
Unverified<1 yr on BharatSealPune, Maharashtra

Order history, on-time rate and reorder rate appear after this supplier's first delivered order on BharatSeal.

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