On-Board® IS 320FX Cryopump
The On-Board® IS 320FX Cryopump, developed specifically to address the challenges of today's Ion Implant processes, provides enhanced hydrogen pumping speed and capacity, while maintaining the quality, performance and reliability you have come to expect.
Specifically designed for Ion Implant applications
Optimised for tool throughput
Intelligent “self-adjusting” technology
Lower cost of ownership
Increased uptime
On-Board® IS XP Cryopump
The On-Board® IS XP Cryopump delivers increased capacity for PVD applications to achieve maximum productivity while maintaining process transparency. At the same time, it leverages the proven energy efficiency, consistent performance and low cost of ownership you have come to expect from the On-Board® IS.
Provides capacity overhead for future process improvements
Lower cost of ownership
Increased up-time
Intelligent “self-adjusting” technology for consistent vacuum performance
