Fast Regen™ capability that extends cryopump performance between regenerations
Simultaneous regeneration capability, enabled by networking your cryopumps, that speeds overall system regeneration
An embedded microprocessor control to enhance performance, perform diagnostic routines and provide communication capability
Sophisticated software and easy-to-use graphical user interfaces to significantly improve performance and operation
Description
Edwards CTI-Cryogenics On-Board vacuum pumps speed up integration and improve system operation - known as the world standard for reliability and performance. On-Board Cryopumps, with fully integrated controls and supporting peripherals, deliver superior up-time and consistent performance to increase overall tool productivity and up-time.
Key attributes
Category
Semiconductor
Place of origin
Pune, MH, India
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